通过MOCVD外延实现了限制层高铝组分及高掺杂,制作出低阈值电流密度的压应变多量子阱激光器材料,后工艺制备了低阈值电流基横模弱折射率脊形波导激光器。该激光器阈值电流最低达到6.2mA,这是我们所见报道的650nm A lGaInP红光激光器的最低阈值电流。在25mA工作电流下,基横模连续输出功率达到18mW。
The operating parameters such as the internal quantum efficiency (η), internal loss (α) and transparent threshold current density (J0) of double quantum well laser diodes were investigated and identified using the program, Integrated System Engineering-Technical Computer Aided Design (ISE-TCAD). Various thicknesses (6, 7, 8, 10, 12 rim) of AlxInyGa1-x-yN barriers with (3 nm) Al0.08In0.08Ga0.84N wells as an active region were studied. The lowest threshold current (lth), and the highest output power (Pop) were 116 mA and 196 mW respectively, at barriers thickness of 6 nm, Al mole fraction of 10% and In mole fraction of 1%, at an emission wavelength of 359.6 nm.
TN248.4 2004064104 高铝AlxGa1-xAs氧化层对垂直腔面发射激光器的影响=EffeCt of high aluminum AlGaAs oxidized layers on vertical cavity surface-emitting lasers[刊,中]/康香宁(中科院半导体所光电子器件国家工程中心,北京(100083)),宋国峰…∥半导体学报.—2004,25(5).—589-593 针对可见光垂直腔面发射激光器的制备,通过湿氮氧化实验和测量微区光致发光谱分别研究了高铝组分AlxGa1-xAs的氧化特性及氧化产物的收缩应力对有源区的影响.结合器件结构设计确定了氧化限制层AlxGa1-xAs的铝组分和最佳位置,并制备出了低阈值电流的AlGaInP系垂直腔面发射激光器。图7参12(严寒)
Jung, Daehwan [Institute for Energy Efficiency, University of California Santa Barbara, California 93106, USA];Norman, Justin [Materials Department, University of California Santa Barbara, California 93106, USA];Kennedy, M. J. [Department of Electrical and Computer Engineering, University of California Santa Barbara, California 93106, USA];Shang, Chen [Materials Department, University of California Santa Barbara, California 93106, USA];Shin, Bongki [Institute for Energy Efficiency, University of California Santa Barbara, California 93106, USA];Wan, Yating [Department of Electrical and Computer Engineering, University of California Santa Barbara, California 93106, USA];Gossard, Arthur C. [Institute for Energy Efficiency, University of California Santa Barbara, California 93106, USA, Materials Department, University of California Santa Barbara, California 93106, USA, Department of Electrical and Computer Engineering, University of California Santa Barbara, California 93106, USA];Bowers, John E. [Institute for Energy Efficiency, University of California Santa Barbara, California 93106, USA, Materials Department, University of California Santa Barbara, California 93106, USA, Department of Electrical and Computer Engineering, University of California Santa Barbara, California 93106, USA]