采用二维、自洽的PIC/MCC(particle-in-cell with Monte Carlo collision)方法,模拟了磁控溅射辉光放电过程,重点讨论了工作参数对放电模式和放电电流的影响.模拟结果表明,当工作气压由小到大或空间磁场从强到弱变化时,放电模式会从阴极空间电荷主导的放电模式过渡到阳极空间电荷主导的放电模式.在过渡状态,对应的工作气压与磁通密度分别为0.67 Pa和0.05 T;随着工作气压的增大,放电电流先增大后趋向平衡,当工作气压超过2.5 Pa时,电流开始随工作气压的增大而减小;而阴极电压增大时,放电电流近似线性增加.
The β-FeSi2 thin film has been applied in the research field of the solar cell,and the thickness of β-FeSi2 absorption layer was chosen through the experiments.However,Up to now neither the optimal thickness of β-FeSi2 absorption layer nor the relationship between the thickness of β-FeSi2 absorption layer and the solar photo wavelength has been theoretically studied.In this paper,the relationship between the thickness of the absorption layer of β-FeSi2 thin film solar cell and the solar photo wavelength is calculated and analyzed by theory.The results show that the thickness of the absorption layer of β-FeSi2 is at least 200 nm when the optical absorption efficiency of the solar energy reaches 90%,and that the optimal thickness range is from 200 nm to 250 nm,and that the optimal wavelength of the photon absorbed by β-FeSi2 thin film solar cell is from 0.46 μm？0.6 μm.Furthermore,two formulas are put forward to indicate the relationship between the thickness of the absorption layer of β-FeSi2 thin film solar cell and the solar photo wavelength.The thickness of the absorption layer of β-FeSi2 thin film solar cell increases linearly with the solar photo wavelength within the optimal photo wavelength.The formulas provide a reliable theoretical basis of determining the thickness of the β-FeSi2 thin film in the solar cell.
