The influence of the distribution of nano-pores on the mechanical properties evaluation of porous low-k films by surface acoustic waves （SAW） is studied. A theoretical SAW propagation model is set up to characterize the periodic porous dielectrics by transversely isotropic symmetry. The theoretical deductions of SAW propagating in the low-k film/Si substrate layered structure are given in detail. The dispersive characteristics of SAW in differ- ent propagation directions and the effects of the Young＇s moduli E, E′ and shear modulus G′ of the films on these dispersive curves are found. Computational results show that E′ and G′ cannot be measured along the propagation direction that is perpendicular to the nano-pores＇ direction.
The logarithmic response complementary metal oxide semiconductor （CMOS） image sensor provides a wide dynamic range, but its drawback is the lack of simple fixed pattern noise（FPN） cancellation scheme. Designed is a novel logarithmic active pixel sensor（APS） with high dynamic range and high output swing. Firstly, the operation principle of mixed-model APS is introduced. The pixel can work in three operation modes by choosing the proper control signals. Then, FPN sources of logarithmic APS are analyzed, and double-sampled technique is implemented to reduce FPN. Finally, according to the simulation results, layout is designed and has passed design rule check（DRC）, electronic rule eheck（ERC） and layout versus schematic（LVS） verifications, and the post-simulation results are basically in agreement with the simulation results. Dynamic range of the new logarithmic APS can reach about 140 dB; and the output swing is about 750 inV. Results show that by using double sampled technique, most FPN is eliminated and the dynamic range is enhanced.
FU Xian-songYAO Su-yingYUAN Yi-dongXU Jiang-taoDING KeYAN Kun-shan
