A novel laser processing technique was developed for making channels in the nano regime in this paper.A Nd:YAG laser was used to dry fabricate micro channels(25μm～100μm di- ameter)in a 1 cm^3 fused silica substrate by thermal-induced processing.By controlling the locations of these initiating micro channels on a silica cube,1D-controllable self-connecting nano fractures can be formed as rectangular channels.These nano channels are smooth and with extremely high aspect ratio(～10~4 depth to width ratio).A possible mechanism is proposed to explain the formation of the nano channels.This laser-based nano channel fabrication technique is fast and inexpensive,and with potential applications in capillary electrophoresis and electro-osmosis driven nano-filtration.
