The photo-generated charge transfer characteristics of n-Si/TiO2/Azo pigment in micrometer regions was studied by means of kelvin probe force microscopy(KFM) technique.The results showed that the photo-generated electrons of Azo pigment particles transferred to n-Si/TiO2 under illumination,and a photo-induced p-n-p structure in micro-scale was observed for the first time.This result indicates that photo-generated charge transfer characteristics of organic/inorganic complex in nano-scale can be observed directly by KFM.