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国家重点基础研究发展计划(2012CB933502)

作品数:6 被引量:15H指数:2
相关作者:魏晓丽付云飞李庆波陈厦平张玲更多>>
相关机构:厦门大学哈尔滨工程大学更多>>
发文基金:国家重点基础研究发展计划国家自然科学基金中国博士后科学基金更多>>
相关领域:电子电信理学机械工程金属学及工艺更多>>

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Study of colors of diamond-like carbon films
2013年
Reflective and transmissive film interference colors were calculated for DLC films on the Si and SiO 2 substrates.The calculated interference colors were compared with photographed colors of the prepared DLC samples.The observed film colors were found to match reasonably well with the corresponding calculated colors,indicating that DLC film colors come from interference instead of color center effects.Color charts for DLC films on the Si and SiO 2 substrates with various optical gaps were constructed,and the relationship between interference color and film properties such as optical gap,thickness and substrate were investigated.Usefulness of the calculated color charts in estimating optical gap or thickness of DLC films were demonstrated.
LI QiongYuWANG FuMingZHANG Ling
关键词:DLC
Efficient adiabatic silicon-on-insulator waveguide taper被引量:10
2014年
A silicon-on-insulator-based adiabatic waveguide taper with a high coupling efficiency and small footprint is presented.The taper was designed to reduce the incidence of mode conversion to higher-order and radiation modes inside the waveguide.In connecting a 0.5-μm-wide output waveguide and a 12-μm-wide input waveguide of a grating coupler,a compact 120-μm-long taper was demonstrated,achieving a transmission of 98.3%.Previously,this transmission level could only be achieved using a conventional linear taper with a length of more than 300μm.
Yunfei FuTong YeWeijie TangTao Chu
关键词:WAVEGUIDETAPERADIABATIC
Modeling and analysis of silicon-on-insulator elliptical microring resonators for future high-density integrated photonic circuits
2012年
We propose a novel resonator containing an elliptical microring based on a silicon-on-insulator platform. Simu- lations using the three-dimensional finite-difference time-domain method show that the novel elliptical microring can efficiently enhance the mode coupling between straight bus waveguides and resonator waveguides or between adjacent resonators while preserving relatively high intrinsic quality factors with large free spectral range. The proposed resonator would be an alternative choice for future high-density integrated photonic circuits.
熊康肖希胡应涛李智勇储涛俞育德余金中
关键词:SILICON-ON-INSULATOR
Development of silicon photonic devices for optical interconnects被引量:4
2013年
Silicon photonic devices based on complementary-metal-oxide-semiconductor(CMOS) compatible technologies have shown attractive performances on very-large-scale monolithic optoelectronic integration,high speed modulation and switching,and efficient off-chip optical coupling.This paper presents the recent progress on fast silicon optical modulation,wavelength-insensitive optical switching and efficient optical coupling techniques in our group.Several CMOS-compatible silicon optical couplers with different structures have been developed,showing the highest coupling efficiency of 65%.Broadband silicon-based optical switches with sub-nanosecond switching on-off time are experimentally realized.Silicon modulators with novel PN junctions are demonstrated with the speed up to 50 Gb s-1.
XIAO XiLI ZhiYongCHU TaoXU HaoLI XianYaoNEMKOVA AnastasiaKANG XiongYU YuDeYU JinZhong
关键词:光子器件光学互连金属氧化物半导体CMOS兼容光电子集成
硅基波导用楔形模斑变换器的研究进展被引量:1
2013年
楔形模斑变换器在利用硅基光子集成技术实现芯片间光互连中有着广泛的应用。文章概述了国内外楔形模斑变换器的最新研究进展。介绍了几种新型模斑变换器的结构及制作的工艺流程,并对其性能及影响楔形模斑变换器耦合效率的几个因素进行了分析比较,进而讨论了这几种模斑变换器存在的问题及进一步提高耦合效率的可能性。
付云飞李庆波
含氢DLC膜的疏水性研究被引量:1
2016年
目的通过疏水性质的研究,证明源电极式和浸入式PECVD方法制备含氢DLC膜存在结构和性质上的差别,并且证明浸入式PECVD方法制备的含氢DLC膜更适于需要强疏水性的表面改性应用。方法在PECVD腔体中通入甲烷和氢气混合气体,同时在面对源电极的绝缘样品架上放置石英基片并沉积类聚合物DLC膜;在源电极上放置石英基片并沉积常规含氢DLC膜。在PECVD腔体中通入乙炔、氢气和四氟化碳混合气体,在面对源电极的绝缘样品架上放置石英基片并沉积掺氟DLC膜。改变气体压强和射频功率,生长一系列含氢DLC膜。利用紫外可见近红外光度计测试DLC膜的透射谱,扫描电子显微镜及原子力显微镜测试其表面形貌。利用接触角测量仪测试两种含氢DLC和一种掺氟DLC膜表面与水、甘油、乙二醇的接触角,并计算其表面能。比较两种含氢DLC膜接触角和表面能的差别,并根据类聚合物DLC膜的微观结构分析可能的原因。比较掺氟和不掺氟DLC膜的接触角并讨论比较结果。结果类聚合物DLC膜的接触角和表面能与具有相同光学带隙的常规含氢DLC膜存在明显差异。类聚合物DLC膜的接触角更大,表面能更低,因而具有更强的疏水性。类聚合物和常规含氢DLC膜与蒸馏水的接触角最大分别为91.2°和79.2°。类聚合物DLC膜中的碳原子具有更高的氢化率,可能是它表面能低和疏水性好的原因。掺氟DLC膜的接触角比具有相同带隙的类聚合物和常规含氢DLC膜都低,这与文献报道的掺氟能提高接触角的现象完全相反。结论类聚合物DLC膜的疏水性更强。结合其更小的内应力、更宽的光学带隙范围和更快的生长速度等特征,使它在医疗、光学保护涂层等领域具有更强的应用性。浸入式PECVD方法生长的掺氟DLC膜不但未提高反而降低了DLC膜的疏水性,需要更多的研究来揭示其中的原因。
魏晓丽张玲陈厦平王辅明
关键词:类金刚石PECVD带隙接触角疏水性
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