The alignment coupling between optical waveguide chips and optical fiber arrays is the basis of the alignment coupling of planar optical waveguide devices, and the precise position detection with angle and spacing adjustments is one of the key steps of alignment coupling. A methodology for position detection, and angle and spacing adjustment was proposed for optical waveguide chips and optical fiber arrays based on machine vision. The experimental results show angle detection precision levels higher than 0.05°, line detection precision levels higher than 0.1 μm, and detection time less than 2 s. Therefore, the system developed herein meets the precise requirements necessary for position detection, and angle and spacing adjustments for optical waveguide chips and optical fiber arrays.