The quadrupole mass spectrometer array (QMSA) is the most important embranchment in the miniaturization of the quadrupole mass spectrometer (QMS). Making miniature mass filter is one of the key technology in the manufacture of QMSA. In this paper, the method of LIGA technology and its application in making mass spectrometer are introduced. This resolve radically the question how to making a miniature QMS in volume, weight, power and cost.
