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磁控溅射法制备纳米晶钛薄膜工艺研究被引量:2
2013年
利用直流磁控溅射法在硅基底上沉积出纳米晶钛薄膜,研究了背底真空度、溅射功率和基底温度对纳米晶钛薄膜结构的影响。实验证明,当背底真空度高于8.8×10-5 Pa时,可制备出致密的纳米晶钛薄膜,当背底真空度低于2.0×10-4 Pa时,钛薄膜被氧化成一氧化钛薄膜;随着溅射功率的增大,纳米晶钛膜的晶粒尺寸呈线性增大,同时钛薄膜的取向也发生改变,表现出明显的(002)织构;随着温度的升高,钛薄膜织构取向发生改变,当温度为500℃时,钛薄膜被氧化为一氧化钛薄膜。制成平整钛薄膜的工艺条件为:背底真空度8.8×10-5 Pa,溅射功率200 W,基底温度室温。
张番刘芳陈爱英刘颍龙
关键词:磁控溅射织构
Effect of bias voltage on microstructure and nanomechanical properties of Ti films被引量:5
2014年
In order to investigate nanomechanical properties of nanostructured Ti metallic material, pure Ti films were prepared by magnetron sputtering at the bias voltage of 0-140 V. The microstructure of Ti films was characterized by X-ray diffraction(XRD), scanning electron microscopy(SEM) and high-resolution transmission electron microscopy(HRTEM). It is interesting to find that the microstructure of pure Ti films was characterized by the composite structure of amorphous-like matrix embodied with nanocrystallines, and the crystallization was improved with the increase of bias voltage. The hardness of Ti films measured by nanoindentation tests shows a linear relationship with grain sizes in the scale of 6-15 nm. However, the pure Ti films exhibit a soft tendency characterized by a smaller slope of Hall-Petch relationship. In addition, the effect of bias voltage on the growth orientation of Ti films was discussed.
刘颍龙刘芳吴倩陈爱英李翔潘登
关键词:NANOCRYSTALLINE
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