纳米压痕是表征纳米尺度材料特性的一项强大技术,但压痕尺寸效应会影响其精度和可重复性。本研究提出一种负载控制的纳米压痕尺寸效应分析模型,利用位错理论进行分析,并通过熔融石英和无氧铜的网格纳米压痕实验验证,研究了网格纳米压痕中的压痕尺寸效应。结果表明,与传统的深度控制方法相比,负载控制的网格纳米压痕尺寸效应模型显著提高了纳米硬度的准确性,将传统模型的置信区间从5%缩小到0.34%。此外,通过统计分析确定了无氧铜三个不同的纳米硬度分布群,凸显了网格纳米压痕表征材料微观机械性能的作用。Nanoindentation is a powerful technique for characterising nanoscale material properties, but indentation size effects can affect its accuracy and repeatability. In this study, we propose a load-controlled analytical model for the indentation size effect in nanoindentation, which is analyzed using dislocation theory and experimentally validated by experimental verification of grid nanoindentation in fused silica and oxygen-free copper. The results show that the load-controlled grid nanoindentation size effect model significantly improves the accuracy of the nano-hardness compared to the conventional depth-controlled method, narrowing the confidence interval of the conventional model from 5% to 0.34%. In addition, three different clusters of nano-hardness distributions for oxygen-free copper were identified by statistical analysis, highlighting the usefulness of grid nanoindentation to characterize the micro-mechanical properties of materials.
